Publication:

Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene

Date

2001

Proceedings Paper

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Author(s)

Waeterloos, Joost

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Coenegrachts, Bart

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Caluwaerts, Rudy

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Struyf, Herbert

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Komiya, Takayuki

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Iwashita, J. M.

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Acq. date: 2026-08-19