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Improved resistivity of NiAl thin films at low temperature for advanced interconnect metallization

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Acq. date: 2026-05-29

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Acq. date: 2026-05-29

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1 since deposited on 2023-04-04
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837 since deposited on 2023-04-04
4last month
Acq. date: 2026-05-29

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