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Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
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1935 since deposited on 2021-10-16
4last month
Acq. date: 2026-08-18
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Statistics
Views
1935 since deposited on 2021-10-16
4last month
Acq. date: 2026-08-18
Citations