Publication:
Atomically controlled processing for in-situ doping in CVD Si and Ge epitaxial growth
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1922 since deposited on 2021-10-24
6last month
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Acq. date: 2026-10-12
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Statistics
Views
1922 since deposited on 2021-10-24
6last month
2last week
Acq. date: 2026-10-12
Citations