Publication:

Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations

Date

2010
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Author(s)

Carbonell, Laure
;
Caluwaerts, Rudy  
;
Volders, Henny  
;
Heylen, Nancy  
;
Kellens, Kristof  
;
Mertens, Sofie  
;
Van Ammel, Annemie  
;
Van Roey, Frieda  
;
Cockburn, Andrew  
;
Gravey, Virgine
;
Shah, Kavita
;
Rajagopalan, Ravi
;
Tokei, Zsolt  
;
Beyer, Gerald  

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1971 since deposited on 2021-10-18
Acq. date: 2026-06-03

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1971 since deposited on 2021-10-18
Acq. date: 2026-06-03

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