Publication:

Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations

Date

2010

Presentation

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Author(s)

Carbonell, Laure

;

Caluwaerts, Rudy

;

;

;

Kellens, Kristof

;

;

Van Ammel, Annemie

;

Van Roey, Frieda

;

Cockburn, Andrew

;

Gravey, Virgine

;

;

Rajagopalan, Ravi

;

;

Statistics

1975 since deposited on 2021-10-18

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Acq. date: 2026-10-13