Publication:

Atom probe tomography for 3D-dopant analysis in FinFET devices

Date

2012

Proceedings Paper

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Files

24425.pdf 4.88 MB

Author(s)

Kambham, Ajay Kumar

;

Zschaetzsch, Gerd

;

Sasaki, Yuichiro

;

Togo, Mitsuhiro

;

Horiguchi, Naoto

;

;

Florakis, Antonios

;

;

;

Gilbert, Matthieu

;

Vandervorst, Wilfried

Statistics

1951 since deposited on 2021-10-20

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Acq. date: 2026-08-16