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The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
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1909 since deposited on 2021-10-21
3last month
Acq. date: 2026-08-21
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Statistics
Views
1909 since deposited on 2021-10-21
3last month
Acq. date: 2026-08-21
Citations