Publication:

Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits

Date

2016

Journal article

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Author(s)

Karageorgos, Ioannis

;

Ryckaert, Julien

;

;

Tung, Maryann C.

;

Wong, H.-S. Philip

;

Karageorgos, Evangelos

;

;

;

Vandenberghe, Geert

;

Stucchi, Michele

;

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Statistics

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Acq. date: 2026-08-16