Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profile

Publication:

2000

Proceedings Paper

Author(s)

Krishnasamy, Rajendran

;

Schoenmaker, Wim

1918 since deposited on 2021-10-14

1last month

Acq. date: 2026-05-31