Publication:

Sub 100nm particle removal with deionized water and a megasonic frequency of 835kHz

Date

2002

Proceedings Paper

Simple item page Full metadata Statistics

Files

6049.pdf 779.45 KB

Author(s)

Lauerhaas, Jeff

;

;

;

;

;

;

;

;

Statistics

2000 since deposited on 2021-10-14

2last month

Acq. date: 2026-05-30