Publication:

Pre-amorphization and co-implantation suitability for advanced PMOS devices integration

Date

2003
Proceedings Paper
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Author(s)

Surdeanu, Radu
;
Pawlak, Bartek  
;
Lindsay, Richard
;
Van Dal, Mark  
;
Doornbos, Gerben  
;
Dachs, Charles
;
Ponomarev, Youri
;
Loo, Josine
;
Henson, Kirklen
;
Verheijen, M.
;
Kaiser, M.
;
Pagès, Xavier
;
Jurczak, Gosia  
;
Stolk, Peter

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1979 since deposited on 2021-10-15
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Acq. date: 2026-08-16

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