Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions

Publication:

2004

Journal article

Author(s)

;

Surdeanu, Radu

;

Colombeau, B.

;

Smith, A.J.

;

Cowern, N.E.B.

;

Lindsay, Richard

;

;

Brijs, Bert

;

;

Cristiano, F.

Applied Physics Letters

1957 since deposited on 2021-10-15

1last month

Acq. date: 2026-10-12