Publication:

Optical testing of EUV pellicle materials

Date

2015

Presentation

Simple item page Full metadata Statistics

Files

32547.pdf 870.61 KB

Author(s)

Pollentier, Ivan

;

Vanpaemel, Johannes

;

Zahedmanesh, Houman

;

Adelmann, Christoph

;

Huyghebaert, Cedric

;

Gallagher, Emily

;

;

Danylyuk, Serhij

;

Bergmann, Klaus

Statistics

2067 since deposited on 2021-10-22

2last month

Acq. date: 2026-06-04