Publication:

Optical testing of EUV pellicle materials

Date

2015
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Author(s)

Pollentier, Ivan  
;
Vanpaemel, Johannes
;
Zahedmanesh, Houman  
;
Adelmann, Christoph  
;
Huyghebaert, Cedric  
;
Gallagher, Emily  
;
Brose, Sasha
;
Danylyuk, Serhij
;
Bergmann, Klaus

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