Publication:

Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers

Date

2023
Journal article
https://doi.org/10.1002/admi.202201934
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.16 MB

Author(s)

Poonkottil, Nithin
;
Rijckaert, Hannes
;
Rajendran, Khannan  
;
Petit, Robin R.
;
Martin, Lisa I. D. J.
;
Van Thourhout, Dries  
;
Van Driessche, Isabel
;
Detavernier, Christophe
;
Dendooven, Jolien

Journal

ADVANCED MATERIALS INTERFACES

Abstract

Description

Statistics

Downloads

276 since deposited on 2023-03-17
4last month
Acq. date: 2026-05-31

Views

1174 since deposited on 2023-03-17
Acq. date: 2026-05-31

Citations

Statistics

Downloads

276 since deposited on 2023-03-17
4last month
Acq. date: 2026-05-31

Views

1174 since deposited on 2023-03-17
Acq. date: 2026-05-31

Citations