Publication:
Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics
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1993 since deposited on 2021-10-15
5last month
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Acq. date: 2026-10-13
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Statistics
Views
1993 since deposited on 2021-10-15
5last month
3last week
Acq. date: 2026-10-13
Citations