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Direct physical evidence of mechanisms of leakage and equivalent oxide thickness reduction in metal-insulator-metal capacitors based on RuOx/TiOx/SrxTiyOz/TiN stacks
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1979 since deposited on 2021-10-20
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Acq. date: 2026-10-12
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1979 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-10-12
Citations