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Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection

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Acq. date: 2026-10-12

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441 since deposited on 2023-05-04
40last month
21last week
Acq. date: 2026-10-12

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1353 since deposited on 2023-05-04
2last month
Acq. date: 2026-10-12

Citations