B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Rosseel, Erik; Ayyad, Mustafa; Morris, Richard; Khazaka, Rami; Loo, Roger; Vantomme, Andre

doi:10.1149/2162-8777/ac546e

Publication:

B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

Date

2022

Journal article

https://doi.org/10.1149/2162-8777/ac546e

Simple item page Full metadata Statistics

Files

Published version 1.85 MB

Author(s)

;

;

;

;

;

;

;

;

Journal

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

Statistics

565 since deposited on 2023-05-04

27last month

Acq. date: 2026-05-31

1363 since deposited on 2023-05-04

1last month

Acq. date: 2026-05-31

B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations