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Impact of the high-temperature process steps on the HfAIO interpoly dielectric stacks for nonvolatile memory applications
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1857 since deposited on 2021-10-17
3last month
Acq. date: 2026-08-18
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Views
1857 since deposited on 2021-10-17
3last month
Acq. date: 2026-08-18
Citations