Publication:

Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation

Date

2021
Journal article
https://doi.org/10.3390/coatings11111352
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 10.21 MB

Author(s)

Astoreca, Laura  
;
Schaubroeck, David  
;
Tabaei, Parinaz Saadat Esbah
;
Ghobeira, Rouba
;
Morent, Rino
;
De Geyter, Nathalie
;
Op de Beeck, Maaike  
;
De Smet, Herbert  

Journal

COATINGS

Abstract

Description

Statistics

Downloads

326 since deposited on 2021-12-09
16last month
4last week
Acq. date: 2026-10-13

Views

1675 since deposited on 2021-12-09
Acq. date: 2026-10-13

Citations

Statistics

Downloads

326 since deposited on 2021-12-09
16last month
4last week
Acq. date: 2026-10-13

Views

1675 since deposited on 2021-12-09
Acq. date: 2026-10-13

Citations