Publication:
Novel method to achieve area selective ALD on copper metal vs. SiO2using vapor-phase deposited SAMS
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1886 since deposited on 2021-10-23
2last month
Acq. date: 2026-10-13
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1886 since deposited on 2021-10-23
2last month
Acq. date: 2026-10-13
Citations