Publication:

Interface trap density metrology from sub-threshold transport in highly scaled undoped Si n-FinFETs

Date

2011
Journal article
https://doi.org/10.1063/1.3660697
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Interface_trap_density_metrology_from_sub-threshold_transport_in_highly_scaled_undoped_Si_n-FinFETs 1.27 MB

Author(s)

Paul, Abhijeet
;
Tettamanzi, Giuseppe C.
;
Lee, Sunhee
;
Mehrotra, Saumitra
;
Collaert, Nadine  
;
Biesemans, Serge  
;
Rogge, Sven
;
Klimeck, Gerard

Journal

Journal of Applied Physics

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294 since deposited on 2021-10-19
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