Publication:

Evaluation of local CD and placement distribution on EUV mask and its impact on wafer

Date

2019

Proceedings Paper

https://doi.org/10.1117/12.2538243

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Author(s)

Vaenkatesan, Vidya

;

Van Adrichem, Paul

;

Kooiman, Marleen

;

;

Van Look, Lieve

;

Frommhold, Andreas

;

Gallagher, Emily

;

;

;

;

Rispens, Gijsbert

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1967 since deposited on 2021-10-27

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Acq. date: 2026-05-29