Publication:

Characterization of the growth of atomic layer deposited WNxCy films on various substrates

Date

2005
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Author(s)

Martin Hoyas, Ana
;
Travaly, Youssef
;
Schuhmacher, Jorg
;
Sajavaara, Timo
;
Whelan, Caroline
;
Eyckens, Brenda
;
Richard, Olivier  
;
Giangrandi,
;
Brijs, Bert
;
Jonas, A.M.
;
Vantomme, Andre  
;
Vandervorst, Wilfried  
;
Celis, Jean-Pierre
;
Maex, Karen  

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Abstract

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2006 since deposited on 2021-10-16
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2006 since deposited on 2021-10-16
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