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Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

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1880 since deposited on 2021-10-18
3last month
Acq. date: 2026-08-22

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Views

1880 since deposited on 2021-10-18
3last month
Acq. date: 2026-08-22

Citations