Publication:

22nm node imaging and beyond: When will EUV take over?

Date

2010
Proceedings Paper
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21602.pdf 9.14 MB

Author(s)

van Setten, Eelco
;
Mouraille, Orion
;
Wittebrood, Friso
;
Dusa, Mircea  
;
van Ingen-Schenau, Koen
;
Finders, Jo
;
Feenstra, Kees
;
Bekaert, Joost  
;
Laenens, Bart
;
Philipsen, Vicky  
;
Ercken, Monique  
;
Hendrickx, Eric  
;
Vandenberghe, Geert  

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