Publication:

Recess metrology challenges for 3D device architectures in advanced technology nodes

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2613771
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Published version 1.4 MB

Author(s)

Santoro, Gaetano
;
Houchens, Kevin
;
Bogdanowicz, Janusz  
;
Elizov, Moshe
;
Yaron, Lior
;
Chemama, Michael
;
Goldenshtein, Alex
;
Zakay, Amit
;
Amit, Noam
;
Briggs, Basoene  
;
Pacco, Antoine  
;
Delhougne, Romain  
;
Cockburn, Andrew
;
Abramovitz, Yaniv
;
Tam, Aviram
;
Adan, Ofer
;
Mertens, Hans  
;
Charley, Anne-Laure  
;
Horiguchi, Naoto  
;
Leray, Philippe  
;
Lorusso, Gian  

Journal

Proceedings of SPIE

Abstract

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1057 since deposited on 2022-09-08
79last month
20last week
Acq. date: 2026-10-13

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1398 since deposited on 2022-09-08
Acq. date: 2026-10-13

Citations