Publication:

SiGe channel formation for 3D vertical channel transistor applications

Date

2014
Meeting abstract
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Capogreco, Elena  
;
Lisoni, Judit
;
Hikavyy, Andriy  
;
Arreghini, Antonio  
;
Vecchio, Emma  
;
Numata, Toshinori
;
Tan, Chi Lim
;
De Meyer, Kristin  
;
Van den Bosch, Geert  
;
Van Houdt, Jan  

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