Publication:
Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls
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1874 since deposited on 2021-10-17
6last month
2last week
Acq. date: 2026-08-18
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Statistics
Views
1874 since deposited on 2021-10-17
6last month
2last week
Acq. date: 2026-08-18
Citations