Publication:
A new technique to fabricate ultra-shallow-junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth
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2012 since deposited on 2021-10-15
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Acq. date: 2026-08-16
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Statistics
Views
2012 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-08-16
Citations