Publication:

RTN assessment of traps in polysilicon cylindrical vertical FETs for NVM application

Date

2013
Journal article
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Author(s)

Caño de Andrade, Maria Glória
;
Toledano Luque, Maria
;
Fourati, Fatma
;
Degraeve, Robin  
;
Martino, Joao Antonio
;
Claeys, Cor
;
Simoen, Eddy  
;
Van den Bosch, Geert  
;
Van Houdt, Jan  

Journal

Microelectronic Engineering

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