Publication:
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
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1975 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-30
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Statistics
Views
1975 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-30
Citations