A CMOS Neural Probe with 1280 Electrodes and 88 Emission Sites Featuring Thermo-Optic Switching and On-Chip Calibration for Dual-Wavelength Optogenetics

Abstract

We present a waveguide-based optogenetics neural probe with 1,280 electrodes, 384 recording channels, and 88 emission sites enabled by dual-layer silicon photonics. Thermo-optic switches are controlled by a custom photonic driver IC, while integrated tap couplers with photodiodes and a temperature sensor provide on-chip calibration and thermal monitoring. The probe achieves a large number of recording and emission sites, enabling reliable large-scale, cell-type-specific optogenetic studies.