Publication:
Chain scission resists for extreme ultraviolet lithography based on high performance polysulfone-containing polymers
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1987 since deposited on 2021-10-19
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Acq. date: 2026-10-13
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Views
1987 since deposited on 2021-10-19
5last month
3last week
Acq. date: 2026-10-13
Citations