Publication:

On a more accurate assessment of scaled copper/low-k interconnects performance

Date

2007

Journal article

Simple item page Full metadata Statistics

Author(s)

Travaly, Youssef

;

;

Carbonell, Laure

;

;

;

Iacopi, Francesca

;

Van Hove, Marleen

;

Stucchi, Michele

;

Journal

IEEE Trans. Semiconductor Manufacturing

Statistics

1908 since deposited on 2021-10-16

3last month

Acq. date: 2026-08-22