Accurate electrical activation characterization of CMOS ultra-shallow profiles

Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I.

Publication:

Accurate electrical activation characterization of CMOS ultra-shallow profiles

Date

2004

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

Vandervorst, Wilfried

;

;

;

;

;

Journal

Materials Science and Engineering B

Statistics

1970 since deposited on 2021-10-15

2last month

Acq. date: 2026-10-13

Accurate electrical activation characterization of CMOS ultra-shallow profiles

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations