Publication:
AlGaN/GaN HEMT grown on large size silicon substrates by MOVPE capped with in-situ deposited Si3N4
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1947 since deposited on 2021-10-16
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Acq. date: 2026-10-12
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1947 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-10-12
Citations