Publication:
CD control for 180-nm and 130-nm gate-level lithography
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2040 since deposited on 2021-09-29
7last month
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Acq. date: 2026-08-14
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Statistics
Views
2040 since deposited on 2021-09-29
7last month
2last week
Acq. date: 2026-08-14
Citations