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The impact of sub monolayers of HfO2 on the device performance of high-k transistors
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The impact of sub monolayers of HfO2 on the device performance of high-k transistors
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Date
2003-12
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ragnarsson, Lars-Ake
;
Pantisano, Luigi
;
Kaushik, Vidya
;
Saito, S.I.
;
Shimamoto, Yasuhiro
;
De Gendt, Stefan
;
Heyns, Marc
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1934
since deposited on 2021-10-15
1
last month
Acq. date: 2026-05-30
Citations
Statistics
Views
1934
since deposited on 2021-10-15
1
last month
Acq. date: 2026-05-30
Citations