Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy

Margetis, Joe; Mosleh, Aboozar; Ghetmiri, Seyed Amir; Al-Kabi, Sattar; Dou, Wei; Du, Wei; Bhargava, Nupur; Yu, Shui-Qing; Profijt, Harald; Kohen, David; Loo, Roger; Vohra, Anurag; Tolle, John

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Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy

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2017

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Material Science in Semiconcductor Processing

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1982 since deposited on 2021-10-24

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Acq. date: 2026-08-15

Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy

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