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Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

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407 since deposited on 2023-03-26
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Acq. date: 2026-08-15

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Downloads

407 since deposited on 2023-03-26
32last month
7last week
Acq. date: 2026-08-15

Views

1240 since deposited on 2023-03-26
2last month
Acq. date: 2026-08-15

Citations