Publication:

Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3009953
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 1.4 MB

Author(s)

Ciesielski, Richard
;
Loo, Roger  
;
Shimura, Yosuke  
;
Bogdanowicz, Janusz  
;
Mani, Antonio
;
Mitterbauer, Christoph
;
Truong, Vinh-Binh
;
Kolbe, Michael
;
Soltwisch, Victor

Journal

Proceedings of SPIE

Abstract

Description

Statistics

Downloads

405 since deposited on 2024-06-15
22last month
3last week
Acq. date: 2026-08-22

Views

652 since deposited on 2024-06-15
Acq. date: 2026-08-22

Citations

Statistics

Downloads

405 since deposited on 2024-06-15
22last month
3last week
Acq. date: 2026-08-22

Views

652 since deposited on 2024-06-15
Acq. date: 2026-08-22

Citations