Publication:

Defect density reduction of the Al2O3/GaAs(001) interface by using H2S molecular beam passivation

Date

2011
Journal article
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Author(s)

Merckling, Clement  
;
Chang, Y.C.
;
Lu, C.Y.
;
Penaud, J.
;
Brammertz, Guy  
;
Scarrozza, Marco
;
Pourtois, Geoffrey  
;
Kwo, J.
;
Hong, M.
;
Dekoster, Johan  
;
Meuris, Marc  
;
Heyns, Marc  
;
Caymax, Matty  

Journal

Surface Science

Abstract

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1925 since deposited on 2021-10-19
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