Publication:
Modeling Sicl4/O2 plasmas used for depositing SiO2 coatings or mask recovery
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2013 since deposited on 2021-10-20
14last month
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Acq. date: 2026-10-13
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Statistics
Views
2013 since deposited on 2021-10-20
14last month
2last week
Acq. date: 2026-10-13
Citations