Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-10-13
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Downloads
1205 since deposited on 2021-11-02
128last month
54last week
Acq. date: 2026-10-13
Views
1687 since deposited on 2021-11-02
5last month
2last week
Acq. date: 2026-10-13
Citations