Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-08-19
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Downloads
963 since deposited on 2021-11-02
185last month
43last week
Acq. date: 2026-08-19
Views
1680 since deposited on 2021-11-02
2last month
Acq. date: 2026-08-19
Citations