Publication:
Reliability of Mo as Word Line Metal in 3D NAND
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Acq. date: 2026-06-03
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695 since deposited on 2021-11-02
26last month
Acq. date: 2026-06-03
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1678 since deposited on 2021-11-02
2last month
Acq. date: 2026-06-03
Citations