Publication:

Verification and extension of the MBL technique for photoresist pattern shape measurement

Date

2011

Proceedings Paper

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Files

22437.pdf 3.67 MB

Author(s)

;

;

Kazumi, Hideyuki

;

;

Hamamatsu, Akira

;

Hasegawa, Norio

;

De Bisschop, Peter

;

;

Leray, Philippe

;

Statistics

1967 since deposited on 2021-10-19

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Acq. date: 2026-08-22