Publication:

High-k dielectrics integration prospects

Date

2005
Proceedings Paper
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Author(s)

Kubicek, Stefan  
;
Van Elshocht, Sven  
;
Delabie, Annelies  
;
Yamamoto, Kazuhiko
;
Beckx, Stephan  
;
Claes, Martine  
;
Van Hoornick, Nausikaa  
;
Kwak, Dong Hwa
;
Hyun, Sangjin
;
Rothschild, Aude
;
Veloso, Anabela  
;
Kottantharayil, Anil
;
Lujan, Guilherme
;
Kittl, Jorge
;
Lauwers, Anne  
;
Kaushik, Vidya
;
Niwa, Masaaki
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Jurczak, Gosia  
;
Biesemans, Serge  

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1957 since deposited on 2021-10-16
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Acq. date: 2026-08-20

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