Publication:
Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2035 since deposited on 2021-10-16
6last month
2last week
Acq. date: 2026-08-20
Citations
Statistics
Views
2035 since deposited on 2021-10-16
6last month
2last week
Acq. date: 2026-08-20
Citations