Publication:

Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O

Date

2007

Journal article

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Files

15707.pdf 175 KB

Author(s)

Fedorenko, Yanina

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Delabie, Annelies

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De Gendt, Stefan

Journal

Electrochemical and Solid-State Letters

Statistics

2040 since deposited on 2021-10-16

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Acq. date: 2026-10-13