Publication:

Extreme scaled gate dielectrics by using ALD HfO2/SrTiO3 composite structures

Date

2009

Proceedings Paper

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Author(s)

Pierreux, Dieter

;

Machkaoutsan, Vladimir

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;

;

;

Adelmann, Christoph

;

Van Elshocht, Sven

;

Popovici, Mihaela Ioana

;

Conard, Thierry

;

;

Ragnarsson, Lars-Ake

;

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1952 since deposited on 2021-10-18

Acq. date: 2026-06-03