Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning

Publication:

2018

Proceedings Paper

Author(s)

;

;

;

;

;

;

1 since deposited on 2021-10-26

Acq. date: 2026-10-13

1925 since deposited on 2021-10-26

7last month

2last week

Acq. date: 2026-10-13